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Gas Handling Equipment:

Laboratory Gas Generators

NanoCHEM® Gas Purification Systems

Semiconductor Gas Delivery Equipment

Gas Delivery Systems

Gas Pressure Regulators

Gas Filters and Purifiers

Gas Flow Measurement & Control

Gas Detection Equipment

Gas Control Valves

Gas Management Accessories

Helium Recovery Solutions

Gas Reference Information

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NanoCHEM® Gas Purification Systems:

Since 1985, Matheson Tri-Gas, Inc., NanoCHEM® purifiers have provided unprecedented purification solutions to the electronics and other industries. NanoCHEM® purifiers were the first point-of-use purifiers to deliver up to nine 9’s (9N) purity gas to the semiconductor industry. Today, NanoCHEM® purifiers offer comprehensive solutions for the source, point-of-use, bulk and proximate purification requirements of specialty gas users.  If you wish to discuss your particular application, please contact us.


Model WA-300 WeldAssure Purifier

  NanoCHEM® Purification Media
  NanoCHEM® Purifiers
  NanoCHEM® End-Point Detection

PuriFilter Gas Purifier



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