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NanoCHEM® Gas Purification Systems
NanoCHEM® Gas Purification Systems:
Since 1985, Matheson Tri-Gas, Inc., NanoCHEM® purifiers have provided unprecedented purification solutions to the electronics and other industries. NanoCHEM® purifiers were the first point-of-use purifiers to deliver up to nine 9’s (9N) purity gas to the semiconductor industry. Today, NanoCHEM® purifiers offer comprehensive solutions for the source, point-of-use, bulk and proximate purification requirements of specialty gas users. If you wish to discuss your particular application, please contact us.
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